Lattice distortion in thin films of IVB metal (Ti, Zr, Hr) nitrides

Elements of x-ray crystallography

E. Parthé · Materials Science and Engineering · 1970 · 758 citations

Natural Sciences, Chemistry, Materials Science +12

<i>Elements of X-ray Crystallography</i>

Leonid V. Azároff, Richard B. Zipin · Physics Today · 1969 · 666 citations

Natural Sciences, Materials Science, Physics +12

<i>Standard X-Ray Diffraction Powder Patterns</i>

Howard E Swanson, Eleanor Tatge, Ruth K. Fuyat · Physics Today · 1954 · 654 citations

Natural Sciences, Chemistry, Materials Science +14

Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson et al. · Thin Solid Films · 1983 · 275 citations

Natural Sciences, Materials Engineering, Materials Science +16

Investigation of reactively sputtered TiN films for diffusion barriers

S. Kanamori · Thin Solid Films · 1986 · 181 citations

Natural Sciences, Materials Engineering, Materials Science +14