Publication | Closed Access
Enhancement of the machinability of silicon by hydrogen ion implantation for ultra-precision micro-cutting
58
Citations
20
References
2013
Year
Materials ScienceIon ImplantationEngineeringMicrofabricationHydrogen Ion ImplantationMechanical EngineeringFabrication TechniqueSilicon On InsulatorMicroelectronicsMicrostructureUltra-precision Micro-cutting
| Year | Citations | |
|---|---|---|
Page 1
Page 1