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Control of threading dislocation density at the initial growth stage of AlN on c-sapphire in plasma-assisted MBE

Materials ScienceMaterials EngineeringAluminium NitrideInitial Growth StageEngineeringDislocation InteractionPhysicsCrystal Growth TechnologySurface ScienceApplied PhysicsDefect FormationMolecular Beam EpitaxyDislocation DensityPlasma-assisted MbeMicrostructure