Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2006 · 62 citations · 17 references
Natural SciencesMaterials EngineeringMaterials SciencePolymer ChemistrySurface ScienceThin FilmsCoatingsEtching ProcessesIon ImplantationPlasma Surface TreatmentPolymer Thin FilmsThin Film EtchingEtch MechanismsImplantation Through Thin FilmsPlasma EtchingPlasma Immersion Ion ImplantationPlasma Treatment Of PolymersPolystyreneSurface Etching
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