Microelectronic Engineering · 1989 · 33 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingOpticsPhotonicsLaser Material ProcessingLaser OpticsLaser PhysicsLaser Surface ProcessingLaser-tissue InteractionUltrafast OpticsExcimer LasersFemtosecond Laser PulsesLaser AblationMaterial AblationUltrafast Laser Material Processing
9
Femtosecond uv excimer laser ablation
S. K�per, M. Stuke · Applied Physics B · 1987 · 317 citations
Natural Sciences, Surgery, Optics +10