Comparison of dry etching of PMMA and polycarbonate in diffusion pump-based O2 capacitively coupled plasma and inductively coupled plasma - Concepedia

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Comparison of dry etching of PMMA and polycarbonate in diffusion pump-based O2 capacitively coupled plasma and inductively coupled plasma

17

Citations

9

References

2010

Year

J.H. Park, S.H. Lee, Kang‐Min Choi, H.S. Noh, J.W. Lee, S. J. Pearton

Thin Solid Films

Materials ScienceEngineeringMicrofabricationApplied PhysicsDry EtchingPlasma ConfinementDiffusion Pump-based O2Gas Discharge PlasmaNonthermal PlasmaPlasma ApplicationPlasma Etching

References

	Year	Citations

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