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Atomic force microscopy using optical interferometry
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1988
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EngineeringPhysicsMicroscopyAtom InterferometryMicroscopy MethodMechanical EngineeringApplied PhysicsScanning Force MicroscopyScanning Probe MicroscopyAtomic PhysicsOptical InterferometryNanometrologyInstrumentationNanotribologyLever Detection MethodContact Force
An atomic force microscope employing optical interferometry for lever detection is presented. The instrument uses optical interferometry for lever detection and can also operate as a scanning tunneling microscope while simultaneously measuring tip–surface contact force. Topographic images of graphite with 50‑Å lateral resolution were obtained using repulsive contact forces, while atomic‑scale images revealing lateral friction variations and electrostatic‑force‑based topographic maps were also recorded.
An atomic force microscope using optical interferometry as the lever detection method is presented. Topographic images of graphite with 50-Å lateral resolution have been obtained using repulsive contact forces. Images of the graphite surface showing the atomic periodicity were also recorded; in this case, the image contrast does not represent surface topography, but rather variations in the lateral frictional force on the tip. Images using attractive electrostatic forces to map topographic features are shown. The instrument has also been operated as a scanning tunneling microscope while simultaneously measuring the contact force between the tip and a graphite surface.