Publication | Closed Access
Characterization of boron nitride films deposited from BCl3-NH3-H2 mixtures in chemical vapour infiltration conditions
99
Citations
19
References
1994
Year
Materials ScienceChemical EngineeringBoron NitrideEngineeringHexagonal Boron NitrideSurface ScienceApplied PhysicsBoron Nitride FilmsChemical VapourInfiltration ConditionsChemical Vapor DepositionBorophene
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