Mechanisms of r.f. plasma nitriding of Ti-6Al-4V alloy

Study of ion-nitriding

M. Hudis · Journal of Applied Physics · 1973 · 236 citations

Natural Sciences, Materials Engineering, Materials Science +10

Interactions of ion beams with surfaces. Reactions of nitrogen with silicon and its oxides

J. Ashley Taylor, Gerald M. Lancaster, A. Ignatiev et al. · The Journal of Chemical Physics · 1978 · 196 citations

Natural Sciences, Chemistry, Materials Science +17

Mechanisms of reactive sputtering of titanium nitride and titanium carbide I: Influence of process parameters on film composition

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson · Thin Solid Films · 1983 · 180 citations

Natural Sciences, Materials Engineering, Materials Science +17

Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation

Michel Moisan, C. Barbeau, R. Claude et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 172 citations

Natural Sciences, Electrical Engineering, Physics +15

Role of nitrogen atoms in ``ion-nitriding''

Gary G. Tibbetts · Journal of Applied Physics · 1974 · 138 citations

Natural Sciences, Materials Science, Physics +11