Publication | Open Access

Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates

Materials ScienceEngineeringMechanical PropertiesBarrier FilmsMechanical EngineeringApplied PhysicsSurface ScienceChemical Vapor DepositionCarbon-modified SiliconPlasma EtchingPlasma ProcessingThin Film Processing