Femtosecond laser micromachining of grooves in silicon with 800 nm pulses - Concepedia

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Femtosecond laser micromachining of grooves in silicon with 800 nm pulses

115

Citations

27

References

2004

Year

T.H.R. Crawford, A. Borowiec, H. K. Haugen

Applied Physics A

PhotonicsAdvanced Laser ProcessingEngineeringPhysicsMicrofabricationLaser Micro-processingFemtosecond Laser MicromachiningApplied PhysicsLaser Processing TechnologyLaser-assisted DepositionMicromachiningMicro-optical ComponentNm PulsesUltrafast Lasers

References

	Year	Citations

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