Concepedia

Publication | Closed Access

GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

DOI

47

Citations

11

References

2010

Year

Markus Bosund, P. Mattila, Abuduwayiti Aierken, T. Hakkarainen, H. Koskenvaara, M. Sopanen, Veli-Matti Airaksinen, Harri Lipsanen
Applied Surface Science

References

YearCitations

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