Publication | Closed Access
2D irregular structure in the LED surface patterned by NSOM lithography
12
Citations
10
References
2012
Year
Materials ScienceOptical MaterialsEngineeringElectron-beam LithographyBeam LithographyOptical PropertiesLed SurfaceSurface ScienceApplied PhysicsPattern TransferOptoelectronic DevicesNsom LithographyOptoelectronicsNanolithography MethodIrregular StructureDiffractive Optic
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