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Elastic stiffness and thermal expansion coefficients of various refractory silicides and silicon nitride films

Materials ScienceEngineeringApplied PhysicsVarious Refractory SilicidesSiliceneThermal PropertySolid MechanicsSemiconductor Device FabricationSilicon On InsulatorThin Film ProcessingMechanics Of MaterialsSilicon Nitride FilmsElastic Stiffness