Surface and Coatings Technology · 2003 · 21 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface EngineeringSurface ScienceCoatingsPlasma Surface TreatmentPlasma-surface InteractionsSurface ModificationSurface PhysicsSurface TreatmentPlasma TreatmentPlasma-assisted CoatingPlasma-enhanced DepositionPlasma-enhanced OxidationPlasma-surface Reactions
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Electron temperature control with grid bias in inductively coupled argon plasma
Jimin Hong, SungYong Seo, S. S. Kim et al. · Physics of Plasmas · 1999 · 72 citations
Pat N. Brookes, Stuart T. Fraser, Robert D. Short et al. · Journal of Electron Spectroscopy and Related Phenomena · 2001 · 49 citations