Publication | Open Access
Limits to Nanopatterning of Fluids on Surfaces in Soft Lithography
26
Citations
20
References
2008
Year
EngineeringNanostructured SurfaceMechanical EngineeringResidual PolydimethylsiloxaneSoft MatterBeam LithographyPolymer ProcessingNanolithographySoft LithographyMicrofluidicsNanolithography MethodMaterials ScienceNanotechnologyFabrication TechniqueUnstable PrintsNanofluidics3D PrintingMicrofabricationSurface ScienceApplied PhysicsPolymer SciencePolymer CharacterizationNanofabrication
Abstract Soft lithographic microcontact printing using the residual polydimethylsiloxane (PDMS) found in elastomeric PDMS stamps is demonstrated to lead to unstable prints with sub‐micrometer dimensions. The statics and dynamics of the process have been followed with time‐resolved atomic force microscopy, imaging ellipsometry, water contact angle measurement, and optical diffraction. It is proposed that this instability places a fundamental limitation on patterning by macromolecular fluids, which is of general relevance to soft lithography and nanoimprint lithography with low viscosity polymers.
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