Concepedia

Publication | Open Access

MEMS technology integrated in the CMOS back end

DOIFull Paper Access

31

Citations

2

References

2010

Year

R. Gaddi, Rob van Kampen, Anartz Unamuno, V. Joshi, Damian Lacey, M. Renault, Charles G. Smith, Richard Knipe, Dennis Yost
Microelectronics Reliability

References

YearCitations

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