Strategies in deep wet etching of Pyrex glass - Concepedia

Concepedia

Publication | Closed Access

Strategies in deep wet etching of Pyrex glass

96

Citations

13

References

2006

Year

Ciprian Iliescu, Francis E. H. Tay, Jianmin Miao

Sensors and Actuators A Physical

Materials ScienceEngineeringMicrofabricationSurface ScienceFabrication TechniquePolymer ProcessingDeep Wet EtchingPlasma EtchingSurface Processing

References

	Year	Citations

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