Matrix isolation Fourier transform infrared spectroscopic study of energetic nitrogen fluxes applied to fabrication of nitride thin films. Observation of N3 radical and quantitative estimation of matrix-isolated N atoms

Abstract

The formation of stable molecules such as NH3, NO, N2O, and HCN as well as reactive transient species, e.g., NH, NH2 and N3, resulting from the reactions of energetic N atoms with a residual background of H2O and hydrogen in cryogenic solid N2 matrices at temperatures of 12–27 K has been studied in situ by Fourier Transform Infrared spectroscopy (FTIR). Bombardment of the matrix by N and N2 neutrals with estimated energies between 20 and 120 eV produces a concentration of N3 radicals linearly proportional to the beam flux. The lower limit concentration of active N atoms stored in a cryomatrix has been derived from FTIR spectroscopic measurements.