Publication | Closed Access
Etch rate and surface morphology of plasma etched glass and glass-ceramic substrates
11
Citations
3
References
2004
Year
Materials ScienceGlass-ceramicEngineeringMicrofabricationEtch RateSurface ScienceApplied PhysicsGlass-ceramic SubstratesPlasma EtchingPlasma ApplicationSurface MorphologyPlasma Processing
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