Sensors and Actuators B Chemical · 1996 · 64 citations · 10 references
EngineeringChemical EngineeringMaterials EngineeringMicroelectromechanical SystemsMicrofabricationReaction EngineeringBiochemical Reaction EngineeringMicrofabrication MaterialsMicrofabrication ProcessesMicrofluidicsMicromachiningSurface MicromachiningElectrochemical MicromachiningGlass Microfluidic Device FabricationGlass Substrate PreparationGlass Surface FunctionalizationMicrofabricated SensorsMicrofluidic Reaction EngineeringMicromachined SensorsMicroreactors
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