Concepedia

Publication | Open Access

Comparison of CF4 and SF6 based plasmas for ECR etching of isotopically enriched 10boron films

DOIFull Paper Access

11

Citations

10

References

2009

Year

Lars F. Voss, C. E. Reinhardt, R. T. Graff, Adam Conway, Rebecca J. Nikolić, Nirmalendu Deo, Chin Li Cheung
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

References

YearCitations

Page 1