Concepedia

Publication | Closed Access

Rapid thermal annealing of ion implanted 6H-SiC by microwave processing

DOI

19

Citations

6

References

1997

Year

Jason A. Gardner, Mulpuri V. Rao, Yushun Tian, O. W. Holland, E. G. Roth, P. H., Iftikhar Ahmad
Journal of Electronic Materials

References

YearCitations

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