Journal of Physics E Scientific Instruments · 1968 · 21 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceElectromagnetismMicrofabricationElectrical Characterization
Rough electrically insulating specimens need to be metallized prior to examination in a scanning electron microscope. A simple device is described which allows eight rotating specimens to be coated simultaneously as the angle of evaporation varies from 90° to 30°.
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