Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 117 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials PhysicsSpectroscopySurface ScienceAuger Electron SpectroscopyElectronic Material CharacterizationSemiconductor SurfacesSurface Chemistry Of SolidsSurface PhysicsSurface SpectroscopyCarbide-based MaterialsCore-level ExcitationLow-energy Electron SpectroscopySilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Surface ScienceSurface Electronic StructureSurface States
The β-SiC(100) surface has been studied by low energy electron diffraction (LEED), Auger electron spectroscopy (AES), high resolution electron energy loss spectra (HREELS), and core level excitation EELS. Two new Si-terminated phases have been discovered, one with (3×2) symmetry, and the other with (2×1) symmetry. Models are presented to describe these phases. New results, for the C-rich surface, are presented and discussed. In addition, core level excitation EELS results are given and compared with theory.