Concepedia

Transmission sputtering and recoil implantation from thin metal films under ion bombardment

J.G. Perkins, P.T. Stroud

Nuclear Instruments and Methods · 1972 · 37 citations · 6 references

DOI

Concepts

References

6

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Ion Bombardment of Solids

L. N. Large · Electronics and Power · 1968 · 574 citations

, , +9

Production Rates of Electrical Resistivity in Copper and Aluminum Induced by Electron Irradiation

G.W. Iseler, H.I. Dawson, A.S. Mehner et al. · Physical Review · 1966 · 84 citations

, , +16

The theory of recoil implantation

R.S. Nelson · Radiation Effects · 1969 · 69 citations

, , +7

Atomic and ionic impact phenomena on metal surfaces

R. Gomer · Journal of the Franklin Institute · 1966 · 36 citations

, , +14