Highly doped Si and Ge formed by GILD (gas immersion laser doping); from GILD to superconducting silicon - Concepedia

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Highly doped Si and Ge formed by GILD (gas immersion laser doping); from GILD to superconducting silicon

41

Citations

17

References

2008

Year

D. Cammilleri, Frédéric Fossard, D. Débarre, C. Tran Manh, C. Dubois, E. Bustarret, C. Marcenat, P. Achatz, D. Bouchier, J. Boulmer

Thin Solid Films

Materials ScienceGas Immersion LaserEngineeringPhysicsApplied PhysicsLaser MaterialSemiconductor Device FabricationPulsed Laser DepositionSilicon On Insulator

References

	Year	Citations

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