3D force sensor for biomechanical applications

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors

Hyung-Kew Lee, Jaehoon Chung, Sun-Il Chang et al. · Journal of Microelectromechanical Systems · 2008 · 348 citations

Engineering, Materials Engineering, Materials Science +17

Capacitive sensors: When and how to use them

Robert Puers · Sensors and Actuators A Physical · 1993 · 327 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Inclination measurement of human movement using a 3-D accelerometer with autocalibration

Hendrik J. Luinge, Petrus H. Veltink · IEEE Transactions on Neural Systems and Rehabilitation Engineering · 2004 · 304 citations · Full text

Natural Sciences, Kinesiology, Mechatronics Engineering +15

The Oxidation of Shaped Silicon Surfaces

R. B. Marcus, T. T. Sheng · Journal of The Electrochemical Society · 1982 · 258 citations

Natural Sciences, Materials Engineering, Materials Science +17