MEMS and piezo actuator-based Fabry-Perot interferometer technologies and applications at VTT

Abstract

Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.