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Electrical properties study of porous silicon layer prepared by electrochemical etching

Materials ScienceElectrical EngineeringElectrical Properties StudyElectrochemical EtchingPorous Silicon LayerEngineeringMicrofabricationNanoelectronicsNanoporous MaterialApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsPlasma EtchingPorous SensorElectrical Insulation