Surface Photochemically Activated Chemical Vapor Deposition of Patterned Aluminum Thin Films

Laser-induced chemical vapor deposition of SiO2

P. Boyer, G. A. Roche, W. H. Ritchie et al. · Applied Physics Letters · 1982 · 146 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Efficient Si solar cells by laser photochemical doping

Thomas F. Deutsch, J. C. C. Fan, G. W. Turner et al. · Applied Physics Letters · 1981 · 110 citations

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Laser-induced microscopic etching of GaAs and InP

D. J. Ehrlich, Richard M. Osgood, Thomas F. Deutsch · Applied Physics Letters · 1980 · 109 citations

Natural Sciences, Electrical Engineering, Materials Science +13

Patterned photonucleation of chemical vapor deposition of Al by UV-laser photodeposition

J. Y. Tsao, D. J. Ehrlich · Applied Physics Letters · 1984 · 92 citations

Natural Sciences, Materials Engineering, Materials Science +17

Patterned aluminum growth via excimer laser activated metalorganic chemical vapor deposition

G. S. Higashi, Cass Fleming · Applied Physics Letters · 1986 · 70 citations · Full text

Engineering, Materials Engineering, Materials Science +14