Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition - Concepedia

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Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition

71

Citations

11

References

1998

Year

A. Suisalu, Jaan Aarik, Hugo Mändar, I. Sildos

Thin Solid Films

Materials ScienceEngineeringNanomaterialsNanotechnologyOxide ElectronicsApplied PhysicsSpectroscopic StudyThin FilmsNanocrystalline MaterialChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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