Hard x-ray contact microscopy with 250nm spatial resolution using a LiF film detector and a tabletop microsource

Abstract

An innovative route for deep-submicrometer spatial resolution hard x-ray microscopy with tabletop x-ray source is proposed. A film of lithium fluoride (LiF) was used as imaging detector in contact mode. We present here the x-ray images recorded on LiF films of a Fresnel zone plate with submicrometer gold structures and of an onion cataphyll. The images were read with an optical confocal microscope in fluorescence mode. The measured spatial resolution was about 250nm, i.e., close to the resolution limit of the confocal microscope. The advantages and drawbacks, and the possible improvements, of this route are discussed.