Publication | Closed Access
Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique
22
Citations
5
References
2008
Year
Materials ScienceEngineeringMicrofabricationNonthermal PlasmaSu-8 RemovalApplied PhysicsNovel Plasma TechniqueGas Discharge PlasmaPlasma ApplicationPlasma ProcessingMicrostructure
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