Vacuum · 2008 · 18 citations · 3 references
EngineeringMaterials EngineeringMaterials SciencePlasma PhysicsSurface EngineeringSurface SciencePlasma Surface TreatmentPlasma-surface InteractionsRadiation Damage In MaterialsSilicon MaterialsSurface ModificationSurface PassivationPassivation Of Silicon SurfacesPlasma-induced Surface DamagePlasma-treated Surface WettabilityRadiation-induced Surface EffectsSilicon PassivationSurface WettabilitySurface Wettability Control
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