Publication | Closed Access
A silicon molecular beam epitaxy system dedicated to device-oriented material research
45
Citations
13
References
1995
Year
Materials EngineeringMaterials ScienceWafer Scale ProcessingEngineeringNanotechnologyApplied PhysicsSemiconductor Device FabricationDevice-oriented Material ResearchMolecular Beam EpitaxySilicon On InsulatorEpitaxial Growth
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