Concepedia

Montecarlo simulation of ion implantation into SiC-6H single crystal including channeling effect

E. Morvan, Philippe Godignon, J. Montserrat, D. Flores, José del R. Millán, J.P. Chante

Materials Science and Engineering B · 1997 · 25 citations · 9 references

DOI

Concepts

References

9

Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations

, , +17

Computer studies of the reflection of light ions from solids

O.S. Oen, Mark T. Robinson · Nuclear Instruments and Methods · 1976 · 675 citations

, , +9

Effective stopping-power charges of swift ions in condensed matter

Werner Brandt, M. Kitagawa · Physical review. B, Condensed matter · 1982 · 566 citations

, , +12

Nonlinear stopping power of an electron gas for slow ions

P. M. Échenique, R. M. Nieminen, J. C. Ashley et al. · Physical review. A, General physics · 1986 · 374 citations

, , +8

Computer simulation of ion implantation into crystalline targets

M. Posselt, J.P. Biersack · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 53 citations

, , +14