Theoretical analysis of the static deflection of plates for atomic force microscope applications

Abstract

The analysis of the static deflection of cantilever plates is of fundamental importance in application to the atomic force microscope (AFM). In this paper we present a detailed theoretical study of the deflection of such cantilevers. This shall incorporate the presentation of approximate analytical methods applicable in the analysis of arbitrary cantilevers, and a discussion of their limitations and accuracies. Furthermore, we present results of a detailed finite element analysis for a current AFM cantilever, which will be of value to the users of the AFM.