Metalorganic CVD of GaAs in a molecular beam system

Molecular beam epitaxy

A.Y. Cho, John R. Arthur · Progress in Solid State Chemistry · 1975 · 1.2K citations

Molecular Beam Epitaxy of GaAs and InP with Gas Sources for As and P

M. B. Panish · Journal of The Electrochemical Society · 1980 · 223 citations

Engineering, Materials Engineering, Materials Science +11

Properties of Epitaxial GaAs Layers from a Triethyl Gallium and Arsine System

Yasuo Seki, Koetsu Tanno, Kazuo Iida et al. · Journal of The Electrochemical Society · 1975 · 107 citations

Engineering, Materials Engineering, Materials Science +17

A New Method for Growing GaAs Epilayers by Low Pressure Organometallics

J.P. Duchemin, Muriel Bonnet, F. Koelsch et al. · Journal of The Electrochemical Society · 1979 · 105 citations

Engineering, Materials Engineering, Materials Science +17

VPE Growth of III/V Semiconductors

G. B. Stringfellow · Annual Review of Materials Science · 1978 · 70 citations

Engineering, Materials Engineering, Materials Science +17