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Metal-assisted etching of p-type silicon under anodic polarization in HF solution with and without H2O2

Materials ScienceMetal-assisted EtchingEngineeringMicrofabricationNanoelectronicsSurface ScienceApplied PhysicsAnodic PolarizationSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingOptoelectronicsNanolithography MethodP-type Silicon