Asymmetry ridge structure fabrication and reactive ion etching of LiNbO3

Wet etching of proton-exchanged lithium niobate-a novel processing technique

Fredrik Laurell, J. Webjörn, G. Arvidsson et al. · Journal of Lightwave Technology · 1992 · 82 citations

Materials Science, Lithium Niobate, Chemical Engineering +13

Highly efficient 40-GHz bandwidth Ti:LiNbO/sub 3/ optical modulator employing ridge structure

Kazuhiro Noguchi, O. Mitomi, Kenji Kawano et al. · IEEE Photonics Technology Letters · 1993 · 72 citations

Optical Materials, Engineering, Optical Transmission System +16

Growth of crystalline LiF on CF4 plasma etched LiNbO3 substrates

Hirotoshi Nagata, Naoki Mitsugi, Kaori Shima et al. · Journal of Crystal Growth · 1998 · 38 citations

Materials Engineering, Materials Science, Engineering +2

Lithium niobate ridge waveguides by nickel diffusion and proton-exchanged wet etching

Weilin Chen, Rei-Shin Chen, Jeng Hong Lee et al. · IEEE Photonics Technology Letters · 1995 · 20 citations

Materials Science, Lithium Niobate, Optical Materials +11

Surface precipitates on single crystal LiNbO₃ after dry-etching by CHF₃ plasma

Kaori Shima, Naoki Mitsugi, Hirotoshi Nagata · Journal of materials research/Pratt's guide to venture capital sources · 1998 · 17 citations

Materials Science, Surface Characterization, Engineering +8