Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm

Abstract

A fiber-optic acoustic pressure sensor based on a large-area nanolayer silver diaphragm is demonstrated with a high dynamic pressure sensitivity of 160 nm/Pa at 4 kHz frequency. The sensor exhibits a noise limited detectable pressure level of 14.5 μPa/Hz(1/2). Its high dynamic pressure sensitivity and simple fabrication process make it an attractive tool for acoustic sensing and photo-acoustic spectroscopy.