AlN and AlGaN growth using low-pressure metalorganic chemical vapor deposition - Concepedia

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AlN and AlGaN growth using low-pressure metalorganic chemical vapor deposition

62

Citations

7

References

1998

Year

Fumihiko Nakamura, Shigeki Hashimoto, Masaki Hara, Synji Imanaga, Masao Ikeda, H. Kawai

Journal of Crystal Growth

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringCorrosionSurface ScienceApplied PhysicsAluminum Gallium NitrideAlgan GrowthChemical DepositionChemical Vapor DepositionMicrostructure

References

	Year	Citations

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