Two‐Dimensional Simulation of Nanoassembly Precursor Species in Ar+H₂+C₂H₂ Reactive Plasmas

Abstract

Abstract The results of two‐dimensional fluid simulation of number densities and fluxes of the main building blocks and surface preparation species involved in nanoassembly of carbon‐based nanopatterns in Ar+H 2 +C 2 H 2 reactive plasmas are reported. It is shown that the process parameters and non‐uniformity of surface fluxes of each particular species may affect the targeted nanopattern quality. The results can be used to improve predictability of plasma‐aided nanofabrication processes and optimize the parameters of plasma nanotools. magnified image