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Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringSurface ScienceApplied PhysicsMethane SeriesSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorChemical Vapor DepositionCarbideHydrocarbon Gas