Stoichiometry in Ti-N barrier layers studied by X-ray emission spectroscopy

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

Natural Sciences, Materials Engineering, Materials Science +12

Properties and microelectronic applications of thin films of refractory metal nitrides

M. Wittmer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 285 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering

B.-O. Johansson, J.‐E. Sundgren, J. E. Greene et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 206 citations

Natural Sciences, Materials Engineering, Materials Science +17

Barrier layers: Principles and applications in microelectronics

M. Wittmer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 202 citations

Engineering, Materials Engineering, Materials Science +17

Band Structure and the Titanium <i>L</i>II, III X-Ray Emission and Absorption Spectra from Pure Metal, Oxides, Nitride, Carbide, and Boride

David W. Fischer, William L. Baun · Journal of Applied Physics · 1968 · 166 citations · Full text

Natural Sciences, Chemistry, Materials Science +17