A study of GaAs etching in alkaline H2O2 solutions

The mechanisms of the decomposition of semiconductors by electrochemical oxidation and reduction

H. Gerischer, W. Mindt · Electrochimica Acta · 1968 · 203 citations

Natural Sciences, Chemistry, Materials Science +12

Optical waveguides in GaAs–AlGaAs epitaxial layers

R. A. Logan, F. K. Reinhart · Journal of Applied Physics · 1973 · 167 citations

Engineering, Electrical Engineering, Physics +17

Selective Etching of Gallium Arsenide Crystals in H[sub 2]SO[sub 4]-H[sub 2]O[sub 2]-H[sub 2]O System

Shinya Iida, Kazuhiro Ito · Journal of The Electrochemical Society · 1971 · 148 citations

Natural Sciences, Materials Engineering, Materials Science +17

Localized GaAs Etching with Acidic Hydrogen Peroxide Solutions

Don W. Shaw · Journal of The Electrochemical Society · 1981 · 131 citations

Engineering, Electrical Engineering, Materials Engineering +16

Investigation of photoelectrochemical corrosion of semiconductors. 1

Karl W. Frese, Marc Madou, S. Roy Morrison · The Journal of Physical Chemistry · 1980 · 97 citations

Natural Sciences, Chemistry, Materials Science +11