Silicon nanocrystals in SiO2 matrix obtained by ion implantation under cyclic dose accumulation - Concepedia

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Silicon nanocrystals in SiO2 matrix obtained by ion implantation under cyclic dose accumulation

21

Citations

8

References

2006

Year

V. A. Terekhov, S. Yu. Turishchev, É. P. Domashevskaya, D. I. Tetelbaum

Physica E Low-dimensional Systems and Nanostructures

Materials ScienceCyclic Dose AccumulationIon ImplantationEngineeringNanomaterialsNanotechnologyApplied PhysicsSiliceneSemiconductor Device FabricationSio2 MatrixNanocrystalline MaterialSilicon On Insulator

References

	Year	Citations

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