Influence of the excitation frequency on surface wave argon discharges: Study of the light emission

Abstract

We compare discharges produced by surface waves at 210 MHz and 2.45 GHz in argon at low pressure (0.1–10 Torr). For plasma lengths up to 1 m, the plasma and wave characteristics are determined (electron density, electric field, effective collision frequency, etc.) and the influence of the excitation frequency is shown. Studying the emission of the discharge, we have established relations between the intensities of Ar i and Ar ii lines and these characteristics, taking into account the wave frequency. That leads to practical criteria for the choice of the excitation frequency.