Concepedia

Publication | Closed Access

Ion implantation in 4H–SiC

DOI

22

Citations

12

References

2007

Year

J. Wong‐Leung, Martin S. Janson, Andrej Kuznetsov, B. G. Svensson, M. K. Linnarsson, Anders Hallén, C. Jagadish, D. J. H. Cockayne
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1